In 2008 Ph.D. Research in Microelectronics and Electronics, Istanbul, 2008

MOEMS thermal imaging camera

M. Fatih Toy, Onur Ferhanoglu, Hamdi Torun, F. Levent Degertekin, Hakan Urey

Atıf

@inproceedings{toy2008moems,
  title={MOEMS thermal imaging camera},
  author={Toy, M Fatih and Ferhanoglu, Onur and Torun, Hamdi and Degertekin, F Levent and Urey, Hakan},
  booktitle={2008 Ph. D. Research in Microelectronics and Electronics},
  pages={101--104},
  year={2008},
  organization={IEEE}
}

Özet

A novel thermo-mechanical infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve Lt100 mK NETD using a 12 bit CCD camera.

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