Two-wavelength grating interferometry for MEMS sensors

Atıf

@article{ferhanoglu2007two,
  title={Two-wavelength grating interferometry for MEMS sensors},
  author={Ferhanoglu, Onur and Toy, M Fatih and Urey, Hakan},
  journal={IEEE Photonics Technology Letters},
  volume={19},
  number={23},
  pages={1895--1897},
  year={2007},
  publisher={IEEE}
}

Özet

Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7mum assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.