In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics ,95 , Hualien, Taiwan, 2007

Two-wavelength Grating Interferometry for Extended Range MEMS Metrology

M. Fatih Toy, Onur Ferhanoglu, Hakan Urey

Atıf

@inproceedings{toy2007two,
  title={Two-wavelength Grating Interferometry for Extended Range MEMS Metrology},
  author={Toy, MF and Ferhanoglu, O and Urey, H},
  booktitle={2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics},
  pages={95--96},
  year={2007},
  organization={IEEE}
}

Özet

Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105 nm to 1.7 um assuming sensitivity is maintained at >50% of the maximum sensitivity.

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