In LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings ,836 , Lake Buena Vista, FL, USA, 2007

Thermal-mechanical Detector Array with Integrated Diffraction Grating

Onur Ferhanoglu, M. Fatih Toy, G. Unal, H. Kalyoncu, G. Kabuli, A. U. Caliskan, Hakan Urey

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Atıf

@inproceedings{ferhanoglu2007thermal,
  title={Thermal-mechanical Detector Array with Integrated Diffraction Grating},
  author={Ferhanoglu, O and Toy, MF and Unal, G and Kalyoncu, H and Kabuli, G and Caliskan, AU and Urey, H},
  booktitle={LEOS 2007-IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings},
  pages={836--837},
  year={2007},
  organization={IEEE}
}

Özet

An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve < 50mK NETD using a 12 bit CCD camera.

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