A. U. Caliskan on Phi-Xhttps://biocil.github.io/tr/author/a.-u.-caliskan/Recent content in A. U. Caliskan on Phi-XHugotr-TRSun, 21 Oct 2007 00:00:00 +0000Thermal-mechanical Detector Array with Integrated Diffraction Gratinghttps://biocil.github.io/tr/publication/2007_leos_ferhanoglu/Sun, 01 Jan 2017 00:00:00 +0000https://biocil.github.io/tr/publication/2007_leos_ferhanoglu/An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections.