MOEMS thermal imaging camera

Abstract

A novel thermo-mechanical infrared (IR) imaging array with integrated diffraction gratings for optical readout was fabricated and tested. Parylene was used as a structural material for its low thermal conductivity and high thermal expansion properties. Tests were performed using an IR blackbody target and first order diffracted light was imaged on a CCD camera to monitor the entire array. Results show that it is possible to achieve Lt100 mK NETD using a 12 bit CCD camera.

Publication
In 2008 Ph.D. Research in Microelectronics and Electronics, Istanbul
M. Fatih Toy
M. Fatih Toy
Associate Professor of Electrical and Electronics Engineering

My research interests include digital holography, quantitative phase imaging, optical diffraction tomography and optical superresolution.

Onur Ferhanoglu
Onur Ferhanoglu
Associate Professor