Abstract
Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7mum assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
Type
Publication
IEEE Photonics Technology Letters, 19 (23)
Onur Ferhanoglu
Associate Professor
M. Fatih Toy
Associate Professor of Electrical and Electronics Engineering
My research interests include digital holography, quantitative phase imaging, optical diffraction tomography and optical superresolution.