Abstract
Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105 nm to 1.7 um assuming sensitivity is maintained at >50% of the maximum sensitivity.
Type
Publication
In 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics ,95 , Hualien, Taiwan
M. Fatih Toy
Associate Professor of Electrical and Electronics Engineering
My research interests include digital holography, quantitative phase imaging, optical diffraction tomography and optical superresolution.
