Abstract
An uncooled thermal detector array with low NETD is designed and fabricated using MEMS bimaterial structures. A diffraction grating is embedded on the pixel membrane for sensing sub-nm mechanical deflections. The first order reflected light was focused on a CCD camera to monitor the entire array. Results show that it is possible to achieve < 50mK NETD using a 12 bit CCD camera.
Type
Publication
In LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings ,836 , Lake Buena Vista, FL, USA
Onur Ferhanoglu
Associate Professor
M. Fatih Toy
Associate Professor of Electrical and Electronics Engineering
My research interests include digital holography, quantitative phase imaging, optical diffraction tomography and optical superresolution.