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Latest
Fourier optics analysis of grating sensors with tilt errors
Uncooled infrared thermo-mechanical detector array: Design, fabrication and testing
Parylene-based uncooled thermomechanical array
MOEMS thermal imaging camera
Two-wavelength grating interferometry for MEMS sensors
Thermal-mechanical Detector Array with Integrated Diffraction Grating
Two-wavelength Grating Interferometry for Extended Range MEMS Metrology
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